Quartz glass shield for fab lamp

Thu, 18 Jun 2026 01:24:15 +0800

On the lithography line, a lamp drifting just 0.5°C during photoresist bake can quietly push linewidths out of spec, and those wafers end up flagged at inspection. We built a quartz glass shield for fab lamps to stop that drift where it starts. What matters under the hood We use fused quartz chosen for stable transmission in short-wave and medium-wave IR, and for low thermal expansion when you’re cycling temperatures fast. It holds wafer-level thermal uniformity within ±0.1°C across the bake surface, so soft bake and hard bake profiles stay repeatable, lot after lot. In cleanroom Class 1–100, the material and finish are set up to generate zero particles—no flaking, no outgassing residues that add to defect counts. The joints and sealing geometry are built to run 24/7 without light leaks or hot spots. Why it plays in the fab In photoresist processing, repeatability is yield. Keep lamp output stable and the heat profile predictable, and you cut CD variation and rework. You end up with tighter process windows, fewer bake-related failures, and line-width control you can count on. The shield also keeps heat where it belongs, which can trim energy draw per batch. And you’ll see fewer unplanned interventions, because thermal drift isn’t creeping back into the equation. Here’s what to watch Quartz is brittle. Treat it like a precision component, not a consumable—avoid mechanical shock, and follow the torque and alignment specs when you reassemble the lamp. Compatibility comes down to lamp geometry, mounting hardware, and the thermal profile of your specific machine. Before you procure, confirm fitment against your equipment footprint and cleanroom handling constraints.

Glass on The Warm IR Heating Factory

Quartz glass shield for fab lamp